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Archive for the ‘ACS’ Category

optical lithography

1.0 Introduction (200-250)– what is optical lithography– steps include spin coating of photoresists, soft bake, mask alignment, UV exposure, and development– the relationship between feature resolution and wavelength of light-do not include history 1.1 Technique of optical lithography (include one figure)1.1.1 Contact lithography (150)– what is contact lithography and the principles1.1.2 Proximity lithography (150)– what […]

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